[UHV XYT&Z Nano Stage]

■ Structure : Stacked type XYT & Z Linear Stage
■ Application : High-end Application, SEM, AFM, SPM, Overlay, Inspection, BIO, ...
■ Environment : Vacuum, 1*10^(-7) torr
■ Travel : 350*150*300˚, 125mm
■ Acceleration Velocity : 0.5G, 400mm/s @ 5kg[Payload]
■ Position Accuracy : ±120nm
■ Bi-dir. Repeatability : ±80nm
■ In-position Stability : ±1.2nm
■ Velocity Ripple : ±0.03%@300mm/s
■ Feedback Resolution : <0.006nm
■ Measurement : Grid Scale[2D] @ TCP
■ Base Material : Granite

제품정보

[UHV XYT&Z Nano Stage]