[UHV XY Nano Stage]

■ Structure : Stacked type XY Linear Stage
■ Application : High-end Application, SEM, AFM, SPM, Overlay, Inspection, BIO, ...
■ Environment : Vacuum, 1*10^(-7) torr
■ Travel : 200*200
■ Acceleration Velocity : 0.3G, 400mm/s @ 3kg[Payload]
■ Position Accuracy : ±80nm
■ Bi-dir. Repeatability : ±50nm
■ In-position Stability : ±1.0nm
■ Feedback Resolution : <0.006nm