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제품소개 > SEMI
Stacked X/Y/T Vacuum stage: SEMI – SEM(Vacuum), Metrology; 제품문의하기 목록으로

상세정보

Structure: Stacked X/Y/T Vacuum stage
Application: SEMI-300mm

•Wafer nano- inspection, DR-SEM, CD-SEM etc.

•E-beam Metrology, Overlay, Inspection, Litho., …

Specifications:

•Travel (X,Y,Θ): 350 + 150 + <360˚

•Payload: 5Kg @slide

•Max. Acceleration: 0.3G

•Max. Velocity: 300mm/s

•Position accuracy: ±150nm

•Bi-dir. Repeatability: ±80nm

•In-position stability: <±1.0nm

•Move & settle time: 250ms

•Vacuum compatible: 1*10-7 Torr.(UHV)

Lead time: 14 weeks (production)
Prototype : 2015.07~2016.02