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제품소개 > Display
Stacked XYT Stage: OLEDos - Wafer 300mm Overlay Metrology; 제품문의하기 목록으로

상세정보

Structure: Stacked X/Y/T Stage
Application: OLEDos - Wafer 300mm (A1)

•Overlay Metrology (OM300, A7)

Specifications:

•Size: 1,700*1,100*1,600

•Max. Travel: 790*540*290º

•Max. Acceleration: 0.3G

•Max. Velocity: 300mm/s

•Bi-dir. Repeatability: ±0.1um

•Straightness: ±3.0um

•Flatness: ±3.0um

•In position stability : < ± 1nm, < ±3nm(T)

•Ceramic Vacuum Cuuck: <3.0um

Lead time: 20 weeks (production)
Prototype: 2023.05~10